E. Vancoille: search on Z-Library

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1

Mechanical properties of heat treated and worn PVD TiN, (Ti, Al)N, (Ti, Nb)N and Ti(C, N) coatings as measured by nanoindentation

E. Vancoille, J.P. Celis, J.R. Roos

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.90 MB

english, 1993

2

[IEEE 2017 Symposium on VLSI Technology - Kyoto, Japan (2017.6.5-2017.6.8)] 2017 Symposium on VLSI Technology - Performance and electrostatic improvement by high-pressure anneal on Si-passivated strained Ge pFinFET and gate all around devices with superior NBTI reliability

Arimura, H., Witters, L., Cott, D., Dekkers, H., Loo, R., Mitard, J., Ragnarsson, L.-A., Wostyn, K., Boccardi, G., Chiu, E., Subirats, A., Favia, P., Vancoille, E., De Heyn, V., Mocuta, D., Collaert,

Year:

2017

Language:

english

File:

PDF, 462 KB

english, 2017

3

High-quality grinding of polycrystalline silicon carbide spherical surfaces

Ling Yin, E.Y.J Vancoille, L.C Lee, H Huang, K Ramesh, X.D Liu

Journal:

Year:

2004

Language:

english

File:

PDF, 799 KB

english, 2004

4

Interrelationship between processing, coatingproperties and functional properties of steered arc physically vapour deposited (Ti,AI)N and (Ti,Nb)N coatings

J.R. Roos, J.P. Celis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. Ebberink, H. Homberg

Journal:

Thin Solid Films

Year:

1990

Language:

english

File:

PDF, 535 KB

english, 1990

5

Growth techniques to reduce V-defect density in GaN and AlGaN layers grown on 200 mm Si (111) substrate

Liang, Hu, Saripalli, Yoga, Kandaswamy, Prem Kumar, Carlson, Eric Porter, Favia, Paola, Richard, Olivier, Bender, Hugo, Zhao, Ming, Thapa, Sarad Bahadur, Vancoille, Eric

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 796 KB

english, 2014

6

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Atomic Layer Deposition of Ru and RuO

Zhao, Chao, Pawlak, Malgorzata, Popovici, Mihaela I., Schaekers, Marc, Sleeckx, Erik, Vancoille, Eric, Wouters, Dirk, Tokei, Zsolt, Kittl, Jorge

Year:

2009

Language:

english

File:

PDF, 458 KB

english, 2009

7

Planar nanogrinding of a fine grained WC-Co composite for an optical surface finish

Ling Yin, J.P. Pickering, K. Ramesh, H. Huang, A.C. Spowage, E.Y.J. Vancoille

Journal:

The International Journal of Advanced Manufacturing Technology

Year:

2005

Language:

english

File:

PDF, 618 KB

english, 2005

8

Plasma Enhanced Chemical Vapor Deposition of Manganese on Low-k Dielectrics for Copper Diffusion Barrier Application

Jourdan, N., Barbarin, Y., Croes, K., Kong Siew, Y., Van Elshocht, S., Tokei, Z., Vancoille, E.

Journal:

ECS Solid State Letters

Year:

2012

Language:

english

File:

PDF, 350 KB

english, 2012

9

On the Correlation Between Static and Low-Frequency Noise Parameters of Vertical Nanowire nMOSFETs

Simoen, Eddy, Chasin, Adrian, Matagne, Philippe, Rosseel, Erik, Hikavyy, Andriy Yakovitch, Loo, Roger, Favia, Paola, Bender, Hugo, Vancoille, Eric, Veloso, Anabela

Journal:

ECS Transactions

Year:

2020

File:

PDF, 372 KB

2020

10

Surface characterization of 6H-SiC (0001) substrates in indentation and abrasive machining

Ling Yin, Eric Y.J. Vancoille, Kuppuswamy Ramesh, Han Huang

Journal:

International Journal of Machine Tools and Manufacture

Year:

2004

Language:

english

File:

PDF, 1.28 MB

english, 2004

11

High-Precision Low-Damage Grinding of Polycrystalline SiC

Yin, L., Vancoille, E.Y.J., Lee, L.C., Liu, Y.C., Huang, H., Ramesh, K.

Journal:

Key Engineering Materials

Year:

2003

Language:

english

File:

PDF, 551 KB

english, 2003

12

Wear testing of hard coatings: more than wear rate?

Celis, J.-P., Stals, L., Vancoille, E., Mohrbacher, H.

Journal:

Surface Engineering

Year:

1998

Language:

english

File:

PDF, 1.09 MB

english, 1998

13

Dry sliding wear of TiN based ternary PVD coatings

E. Vancoille, J.P. Celis, J.R. Roos

Journal:

Year:

1993

Language:

english

File:

PDF, 1.04 MB

english, 1993

14

AlN/AlGaN/GaN buffer optimization on silicon (111): bow and crystal quality control for Si-CMOS fabs

Kandaswamy, Prem Kumar, Liang, Hu, Zhao, Ming, Yoga, Saripalli, Carlson, Eric Porter, Thapa, Sarad Bahadur, Hove, Marleen Van, Richard, Olivier, DeVos, Brecht, Vancoille, Eric, Dutta, Barun

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 1.55 MB

english, 2014

15

Proton formation and diffusion in amorphous SiNx:H

Dekkers, H.F.W., Prajapati, V., Van Elshocht, S., Vancoille, E.

Journal:

MRS Proceedings

Year:

2011

Language:

english

File:

PDF, 569 KB

english, 2011

16

Ultraprecision grinding of tungsten carbide for spherical mirrors

Yin, L, Vancoille, E Y J, Ramesh, K, Huang, H, Pickering, J P, Spowage, A C

Journal:

ARCHIVE Proceedings of the Institution of Mechanical Engineers Part B Journal of Engineering Manufacture 1989-1996 (vols 203-210)

Year:

2004

Language:

english

File:

PDF, 5.60 MB

english, 2004

17

Growth and characterization of DH-HEMT structures with various AlGaN barriers and AlN interlayers on 200 mm Si(111) substrates

Zhao, Ming, Saripalli, Yoga, Kandaswamy, Prem Kumar, Liang, Hu, Firrincieli, Andrea, Decoutere, Stefaan, Vancoille, Eric

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 518 KB

english, 2014

18

Heteroepitaxy of InP on Si(001) by selective-area metal organic vapor-phase epitaxy in sub-50 nm width trenches: The role of the nucleation layer and the recess engineering

Merckling, C., Waldron, N., Jiang, S., Guo, W., Collaert, N., Caymax, M., Vancoille, E., Barla, K., Thean, A., Heyns, M., Vandervorst, W.

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 2.04 MB

english, 2014

19

[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring

Halder, Sandip, Mols, Yves, van den Heuvel, Dieter, van Puymbroeck, Jan, Caymax, Matty, Vancoille, Eric, Nieuborg, Nancy, Bast, Gerhard, Simpson, Gavin, Peikert, Milko, Polli, Marco, Ulea, Neli, Seong

Year:

2014

Language:

english

File:

PDF, 486 KB

english, 2014

20

[Tribology Series] Thin Films in Tribology, Proceedings of the 19th Leeds-Lyon Symposium on Tribology held at the Institute of Tribology, University of Leeds Volume 25 || Mechanical Properties of Tin, (Ti,Al)N, (Ti,Nb)N and Ti(C,N) Coatings Measured by Nanoindentation

Year:

1993

Language:

english

File:

PDF, 654 KB

english, 1993

21

The Development of (Ti,Al)N and (Ti,Nb)N Ceramic Coatings Produced by Steered Arc Ion-Plating

Celis, J.P., Roos, J.R., Vancoille, E., Boelens, S., Ebberink, J.

Journal:

Materials Science Forum

Year:

1992

Language:

english

File:

PDF, 689 KB

english, 1992

22

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - ALD Barrier Deposition on Porous Low-k Dielectric Materials for Interconnects

Van Elshocht, Sven, Delabie, Annelies, Dewilde, Sven, Meersschaut, Johan, Swerts, Johan, Tielens, Hilde, Verdonck, Patrick, Witters, Thomas, Vancoille, Eric

Year:

2011

Language:

english

File:

PDF, 78 KB

english, 2011

23

Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese

Jourdan, Nicolas, Krishtab, Mikhail B., Baklanov, Mikhail R., Meersschaut, Johan, Wilson, Christopher J., Ablett, James M., Fonda, Emiliano, Zhao, Larry, Van Elshocht, Sven, Tökei, Zsolt, Vancoille,

Journal:

Electrochemical and Solid-State Letters

Year:

2012

Language:

english

File:

PDF, 200 KB

english, 2012

24

ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Evaluation of Metallization Options for Advanced Cu Interconnects Application

Jourdan, Nicolas, Carbonell, Laureen, Heylen, Nancy, Swerts, Johan, Armini, S., Caro, A. Maestre, Demuynck, S., Croes, K., Beyer, G., Tökei, Zsolt, Elshocht, S. Van, Vancoille, E.

Year:

2011

Language:

english

File:

PDF, 657 KB

english, 2011

25

Structural Characteristics of PVD Ti-Based Coatings in Relation to their Wear and Corrosion Behaviour

Drees, D., Vancoille, E., Celis, J.P., Roos, J.R.

Journal:

Materials Science Forum

Year:

1994

Language:

english

File:

PDF, 1.02 MB

english, 1994

26

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Metal-Organic Chemical Vapor Deposition of Ti-Doped NiO Layers for Application in Resistive Switching Memories

Meersschaut, J., Toeller, M., Schaekers, Marc, Wang, X.P., Brijs, Bert, Wouters, Dirk J., Jurczak, Malgorzata, Altamime, L., Van Elshocht, S., Vancoille, E.

Year:

2010

Language:

english

File:

PDF, 872 KB

english, 2010

27

[IEEE 2015 Symposium on VLSI Technology - Kyoto, Japan (2015.6.16-2015.6.18)] 2015 Symposium on VLSI Technology (VLSI Technology) - Si-cap-free SiGe p-channel FinFETs and gate-all-around transistors in a replacement metal gate process: Interface trap density reduction and performance improvement by high-pressure deuterium anneal

Mertens, H., Ritzenthaler, R., Arimura, H., Franco, J., Sebaai, F., Hikavyy, A., Pawlak, B. J., Machkaoutsan, V., Devriendt, K., Tsvetanova, D., Milenin, A. P., Witters, L., Dangol, A., Vancoille, E.,

Year:

2015

Language:

english

File:

PDF, 709 KB

english, 2015

28

Selective metal-organic chemical vapor deposition growth of high quality GaAs on Si(001)

Guo, W., Date, L., Pena, V., Bao, X., Merckling, C., Waldron, N., Collaert, N., Caymax, M., Sanchez, E., Vancoille, E., Barla, K., Thean, A., Eyben, P., Vandervorst, W.

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 795 KB

english, 2014

29

[Tribology Series] Wear Particles: Frorn the Cradle to the Grave, Proceedings of the 18th Leeds-Lyon Symposium on Tribology Volume 21 || Paper V (i) Modelling a Ball-on-Disk Experiment for the System 100Cr6 Steel Vs (Ti,X)N Coating

Year:

1992

Language:

english

File:

PDF, 851 KB

english, 1992

30

Influence of microstructure on ultraprecision grinding of cemented carbides

Ling Yin, A.C. Spowage, K. Ramesh, H. Huang, J.P. Pickering, E.Y.J. Vancoille

Journal:

International Journal of Machine Tools and Manufacture

Year:

2004

Language:

english

File:

PDF, 5.38 MB

english, 2004

31

Tribo-oxidation of a TiN coating sliding against corundum

Vancoille, E., Blanpain, B., Xingpu, Ye, Celis, J-P., Roos, J. R.

Journal:

Journal of Materials Research

Year:

1994

Language:

english

File:

PDF, 3.68 MB

english, 1994

32

Tribological and structural characterization of a physical vapour deposited TiC/Ti(C,N)/TiN multilayer

E. Vancoille, J.P. Celis, J.R. Roos

Journal:

Tribology International

Year:

1993

Language:

english

File:

PDF, 822 KB

english, 1993

33

[IEEE 2019 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2019.12.7-2019.12.11)] 2019 IEEE International Electron Devices Meeting (IEDM) - Vertical Nanowire and Nanosheet FETs: Device Features, Novel Schemes for Improved Process Control and Enhanced Mobility, Potential for Faster & More Energy Efficient Circuits

Veloso, A., Hikavyy, A., Loo, R., Paraschiv, V., Chan, B. T., Radisic, D., Li, W., Versluijs, J. J., Teugels, L., Sebaai, F., Favia, P., Eneman, G., Bender, H., Vancoille, E., Scheerder, J. E., Fleisc

Year:

2019

File:

PDF, 2.56 MB

2019

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